4.7 Review

Review in manufacturing methods of nanochannels of bio-nanofluidic chips

Journal

SENSORS AND ACTUATORS B-CHEMICAL
Volume 254, Issue -, Pages 648-659

Publisher

ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2017.07.139

Keywords

Nanochannels; Manufacturing method; Bio-nanofluidic chips; Nanofluidics; Application

Funding

  1. Liaoning Province Doctor Startup Fund [20141131]
  2. Fund of Liaoning Province Education Administration [L2014241]

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This review reports the progress on the recent development of manufacturing methods of nanochannels of bio-nanofluidic chips. Various manufacturing methods including reactive ion etching, high energy beam processing method, interference lithography, nanoimprinting, thin film deposition processing technology, hot embossing, stress release processing technology, molecular self-assembly processing technology, PDMS deformation processing and biofabrication of nanochannels are illustrated and discussed. The advantages and disadvantages of each manufacturing methods are expatiated. A variety of bio-nanofluidic chips fabricated with different manufacturing methods are also expounded and analyzed. This paper will provide a particularly convenient and valuable reference to those who intend to research the fabrication of bio-nanofluidic chips. (C) 2017 Elsevier B.V. All rights reserved.

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