Journal
SENSORS AND ACTUATORS B-CHEMICAL
Volume 255, Issue -, Pages 2002-2010Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2017.08.216
Keywords
Pd/SnO2; Hierarchical mixed materials; Microheater; Ethanol sensing; Gas sensors
Funding
- Wuhan Science and Technology Bureau [2015060202010121]
- National Natural Science Foundation of China [21471120]
- International Cooperation Foundation of Hubei Province [2012IHA00201]
- Educational Commission of Hubei Province of China [T201306]
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A novel gas microsensor combining SnO2 submicron/nanostructured porous sensitive film with Micro-Electro-Mechanical systems (MEMS) microheater was successfully fabricated. The film was made of hierarchically mixed Pd/SnO2 (HM-PTO) composites composed of Pd/SnO2 hollow submicrospheres (Pd/SO2-HSs)and Pd/SnO2 nanoparticles (Pd/Snot-NPs) deposited on the microheater platform using the microdispensing method. The as-prepared HM-PTO sensors exhibited high sensitivities, fast response/recovery rates, good selectivity, reliable reversibility, and relevant stability towards ethanol at low power consumption. The resulting superior sensing performances were attributed to the unique hierarchical structure. The internal void architecture of Pd/SnO2-HSs provided large specific surface areas, proper mesopore size distribution, large number of active adsorption/interaction sites, as well as promoted the chemisorption and dissociation of gas molecules due Pd-doping to yield superior gas response. In particular, the nano-sized SnO2 particles ensured the uniform deposition of the materials to yield enhanced local conductivities, and possibly faster phase transfer reactions responsible for the extremely good response/recovery performance. This simple fabrication procedure combined with high sensing performances look promising for the development of hierarchical morphologies of novel materials for gas sensing applications. (C) 2017 Elsevier B.V. All rights reserved.
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