Journal
IEEE PHOTONICS TECHNOLOGY LETTERS
Volume 27, Issue 13, Pages 1418-1421Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/LPT.2015.2423637
Keywords
MEMS mirror; electrothermal actuator; Fourier transform spectroscopy
Funding
- National Science Foundation [0901711]
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An amplitude-division Fourier transform spectroscopy system has been constructed. The system design hinges on an electrothermally actuated micromirror with large piston motion. The micromirror is composed of electrothermal mesh actuators and can generate up to 95 mu m usable linear optical path difference of the system at only 0.8 V-dc. A custom electrical system is developed to control the micromirror and data processing is implemented to extract the spectrum from interferograms. The system can achieve a spectral resolution of 5 nm at 532 nm.
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