Journal
SENSORS AND ACTUATORS B-CHEMICAL
Volume 258, Issue -, Pages 704-714Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2017.11.060
Keywords
Functional polymer; Inductive coupled plasma; Porous MIM-type capacitive humidity sensor; Reactive ion etching; TiO2 microparticles
Funding
- National Natural Science Foundation of China [61604060]
- China Postdoctoral Science Foundation [2017M611367]
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We propose a high-performance porous metal-insulator-metal-type capacitive humidity sensor based on a functional polymer mixed with TiO2 microparticles subjected to inductively coupled plasma (ICP) and reactive-ion etching (RIE) treatments. The humidity sensor is composed of a porous top electrode, a TiO2-containing functional polymer humidity-sensitive layer subjected to two types of oxygen plasma treatment, a bottom electrode, and a glass substrate. The initial O-2 ICP dry-etching utilizes higher intensity plasma for deep etching in the inlet holes on the top electrode to increase the contact area and shorten the vapor absorption path, thereby yielding high sensitivity and low hysteresis. Further, the RIE treatment leads to roughening of the polymer etching surface and further improving the performance of the humidity sensor. The functional polymer mixed with TiO2 microparticles exhibits excellent hysteresis over a wide humidity sensing range. The fabricated sensors are tested at various relative humidity (RH) values, achieving an ultra-low hysteresis of 0.64% RH at 60% RH, a high sensitivity of 1.24 pF/% RH, a fast response time of less than 25 s, good temperature dependence, and a stable capacitance value witha maximum error rate of 0.15% over 120 h of continuous testing. (c) 2017 Elsevier B.V. All rights reserved.
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