3.8 Proceedings Paper

Plasma-assisted MBE growth of ZnO on GaAs substrate with a ZnSe buffer layer

Publisher

WILEY-V C H VERLAG GMBH
DOI: 10.1002/pssc.201100613

Keywords

MBE; ZnO; GaAs; ZnSe

Funding

  1. NSF [ECCS-1028364, HRD-0833180]
  2. Army Research Office [W911NF0810419]
  3. PSCUNY Award
  4. Direct For Education and Human Resources
  5. Division Of Human Resource Development [833180] Funding Source: National Science Foundation
  6. Div Of Electrical, Commun & Cyber Sys
  7. Directorate For Engineering [1028364] Funding Source: National Science Foundation

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ZnO thin films were grown by plasma-assisted MBE on GaAs substrates with ZnSe buffer layers. GaAs with different orientations: (001), (111) A, and (111) B were investigated. X-ray diffraction measurements showed that ZnO grown on (111) B GaAs substrates have the best structural quality. All the samples showed good optical qualities as indicated by room temperature photoluminescence measurements. (C) 2012 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim

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