Journal
LASER ASSISTED NET SHAPE ENGINEERING 7 (LANE 2012)
Volume 39, Issue -, Pages 534-541Publisher
ELSEVIER SCIENCE BV
DOI: 10.1016/j.phpro.2012.10.070
Keywords
In-volume selective laser-induced etching; microchannel in glass; high speed microscanner
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Digital photonic production of 3D microfluidic devices and assembled micro mechanics inside fused silica glass is carried out using ISLE directly from digital CAD data. To exploit the potential productivity of new high average power fs-lasers > 150 W a modular high speed scanning system has been developed. Acousto-optical beam deflection, galvo-scanners and translation stages are controlled by CAM software. Using a lens with 10 mm focal length a focus radius of 1 mu m is scanned with a velocity of 12 m/s on 400 mu m track radius enabling the up-scaling of the ISLE-process using fs-laser radiation with up to 30 W. (C) 2012 Published by Elsevier B. V. Selection and/or review under responsibility of Bayerisches Laserzentrum GmbH
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