Journal
2012 7TH EUROPEAN MICROWAVE INTEGRATED CIRCUITS CONFERENCE (EUMIC)
Volume -, Issue -, Pages 20-23Publisher
IEEE
Keywords
tunable FBARs; BaxSr1-xTiO3 thin films
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Improved tunable performance of high Q-factor BaxSr1-xTiO3 film bulk acoustic wave resonators (FBARs), achieved by varying Ba concentration, is demonstrated. The Ba0.5Sr0.5TiO3 FBARs reveal tunability of series resonance frequency up to 2.4%, electromechanical coupling coefficient up to 7.5% and rather high figure of merit, Qf approximate to 1300 GHz. Correlations between the measured electroacoustic parameters are analyzed using the theory of dc bias induced piezoelectric effect in paraelectric phase ferroelectrics.
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