Journal
IEEE ELECTRON DEVICE LETTERS
Volume 36, Issue 4, Pages 396-398Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/LED.2015.2404874
Keywords
Carbon nanotube; field emission; X-ray source; electrostatic focusing lens; multiple-energy X-ray
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Funding
- Ministry of Science, ICT and Future Planning, Korea [P0037391, B551179-12-04-00, 14ZE1140]
- National Research Council of Science & Technology (NST), Republic of Korea [15ZE1100, 15IE1200] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
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We fabricated and analyzed an electrostatic focusing lens (FL) module comprising a micro-FL with many holes near the gate and a macro-FL of single aperture toward the anode for carbon nanotube (CNT) emitter-based X-ray sources. The micro-FL suppresses the divergence of the electron beams whereas the macro-FL governs the shape of the beam bundle. The FL module can be controlled over a wide range of gate and anode voltages while maintaining the focal spot. We achieved a small focal spot of 300 mu m from CNT emitter dot arrays of 10 mm x 1.6 mm with line pairs of 3 lp/mm maintained for different anode voltages.
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