Journal
IEEE ELECTRON DEVICE LETTERS
Volume 36, Issue 11, Pages 1215-1218Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/LED.2015.2478899
Keywords
Molybdenum; edge contact; Schottky barrier; contact resistance; MoS2
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Funding
- Industrial Strategic Technology Development Program [10045145]
- Korea Evaluation Institute of Industrial Technology (KEIT) [10045145] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
- National Research Foundation of Korea [22A20130000091] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
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We demonstrate a two-dimensional (2D) multilayered molybdenum disulfide (MoS2) transistor with molybdenum (Mo) side and edge contacts, which is deposited using a dc-sputtering method. It exhibits field-effect mobility of 23.9 cm(2)/Vs and ON/OFF ratio of 10(6) in a linear region. A current-voltage study under different temperatures (300-393 K) reveals that the Mo-MoS2 transistor shows a band transport characteristics, and a Schottky barrier height of 0.14 eV is estimated using a thermionic emission theory. Finally, the side and edge contacts of Mo-MoS2 are confirmed through the transmission electron microscope analysis. Our results not only show that Mo can be an alternative contact metal to other low work-function metals but also that the edge contact may play an important role in resolving the performance degradation over thickness increase of the MoS2 channel layer.
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