Electronically controlled optical beam-steering by an active phased array of metallic nanoantennas

An optical phased array of nanoantenna fabricated in a CMOS compatible silicon photonics process is presented. The optical phased array is fed by low loss silicon waveguides with integrated ohmic thermo-optic phase shifters capable of 2 pi phase shift with similar to 15 mW of applied electrical power. By controlling the electrical power to the individual integrated phase shifters fixed wavelength steering of the beam emitted normal to the surface of the wafer of 8 degrees is demonstrated for 1 x 8 phased arrays with periods of both 6 and 9 mu m. (C) 2013 Optical Society of America