Journal
OPTICS LETTERS
Volume 43, Issue 4, Pages 831-834Publisher
OPTICAL SOC AMER
DOI: 10.1364/OL.43.000831
Keywords
-
Categories
Funding
- National Key RAMP
- D Program of China [2017YFB1104600]
- National Natural Science Foundation of China (NSFC) [61590930, 91423102, 51335008, 61435005]
Ask authors/readers for more resources
This work developed a method of femtosecond laser (fs-laser) parallel processing assisted by wet etching to fabricate 3D micro-optical components. A 2D fs-laser spot array with designed spatial distribution was generated by a spatial light modulator. A single-pulse exposure of the entire array was used for parallel processing. By subsequent wet etching, a close-packed hexagonal arrangement, 3D concave microlens array on a curved surface with a radius of approximately 120 mu m was fabricated, each unit lens of which has designable spatial distribution. Characterization of imaging was carried out by a microscope and showed a unique imaging property in multi-planes. This method provides a parallel and efficient technique to fabricate 3D micro-optical devices for applications in optofluidics, optical communication, and integrated optics. (C) 2018 Optical Society of America
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available