Journal
OPTICAL MATERIALS
Volume 78, Issue -, Pages 380-387Publisher
ELSEVIER
DOI: 10.1016/j.optmat.2018.02.051
Keywords
Ultrafast laser; Deposition; Material melting; Micro/nano structure; Silicon
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Funding
- National Natural Science Foundation of China [51775425]
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This study reported the fabrication of a large area of micro/nano structures with different morphologies and sizes by the deposition of ablated material and melting of material on silicon through a line-shaped femtosecond laser beam irradiation. The evolution of micro/nano structures on the silicon surface was demonstrated with the laser fluence of 0.64 J/cm(2). It was found that the melting of material was responsible for the formation of the micro-protrusions from laser-induced periodic surface structures (LIPSSs). Additionally, the deposition fell on the surface of the micro-protrusions in oblique incidence way, causing LIPSSs obscure and even invisible. As a consequence, those micro-protrusions gradually evolved into the micro-spikes with the ladder-like surface. Then, various laser fluences were applied to regulate the deposition and melting behaviors of silicon, to obtain the micro/nano structures with different morphologies and sizes. The formation mechanism of these micro/nano structures was analyzed. On this basis, the optical properties test showed that best anti-reflectivity was referred to the sample full of micro-spikes with the ladder-like surface, and the average reflectance has decreased from similar to 38.17% of the planar silicon to similar to 4.75% in the waveband between 300 and 1000 nm. (C) 2018 Elsevier B.V. All rights reserved.
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