Journal
OPTICAL ENGINEERING
Volume 57, Issue 5, Pages -Publisher
SPIE-SOC PHOTO-OPTICAL INSTRUMENTATION ENGINEERS
DOI: 10.1117/1.OE.57.5.051506
Keywords
optics; photonics; laser diodes; optical feedback; interferometry; metrology; measurements
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We present an overview of the applications of self-mixing interferometer (SMI) to tasks of interest for mechanical engineering, namely high-resolution measurement of linear displacements, measurements of angles (tilt, yaw, and roll), measurements of subnanometer vibrations, and absolute distance, all on a remote target-representative of the tool-carrying turret of a tool-machine. Along with the advantages of SMI-compactness, low cost, minimum invasiveness, ease of use, and good accuracy, we illustrate the typical performance achieved by the basic SMI sensors, that is, the versions requiring a minimum of signal processing and discuss special features and problems of each approach. (C) 2017 Society of Photo-Optical Instrumentation Engineers (SPIE)
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