4.8 Article

Role of Carbon Nanotube Inter layer in Enhancing the Electron Field Emission Behavior of Ultrananocrystalline Diamond Coated Si-Tip Arrays

Journal

ACS APPLIED MATERIALS & INTERFACES
Volume 7, Issue 14, Pages 7732-7740

Publisher

AMER CHEMICAL SOC
DOI: 10.1021/acsami.5b00844

Keywords

Ultrananocrystalline diamond films; hybrid granular structured diamond films; carbon nanotubes; plasma illumination behavior; electron field emission properties

Funding

  1. Ministry of Science and Technology, Taiwan, Republic of China [MOST 103-2112-M-032-002]
  2. National Science Council, Taiwan, Republic of China [NSC 101-2221-E-007-064-MY3]

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We improved the electron field emission properties of ultrananocrystalline diamond (UNCD) films grown on Si-tip arrays by using the carbon nanotubes (CNTs) as interlayer and post-treating the films in CH4/Ar/H-2 plasma. The use of CNTs interlayer effectively suppresses the presence of amorphous carbon in the diamond-to-Si interface that enhances the transport of electrons from Si, across the interface, to diamond. The post-treatment process results in hybrid-granular-structured diamond (HiD) films via the induction of the coalescence of the ultrasmall grains in these films that enhanced the conductivity of the films. All these factors contribute toward the enhancement of the electron field emission (EFE) process for the HiD(CNT/Si-tip) emitters, with low turn-on field of E-0 = 2.98 V/mu m and a large current density of 1.68 mA/cm(2) at an applied field of 5.0 V/mu m. The EFE lifetime stability under an operation current of 6.5 mu A was improved substantially to tau(HiD/CNT/Si-tip) = 365 min. Interestingly, these HiD(CNT/Si-tip) materials also show enhanced plasma illumination behavior, as well as improved robustness against plasma ion bombardment when they are used as the cathode for microplasma devices. The study concludes that the use of CNT interlayers not only increase the potential of these materials as good EFE emitters, but also prove themselves to be good microplasma devices with improved performance.

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