MEMS accelerometers utilizing resonant microcantilevers with interrogated single mode waveguides and Bragg gratings

We have demonstrated two monolithically integrated Bragg grating based accelerometers, both with the optical path and mechanical structure being made from the same substrate. The unique fabrication techniques, Direct UV Writing and precision dicing, used to create the glass microcantilevers are discussed. We show experimental results from two different Bragg grating based interrogation systems, one utilizing a single Gaussian apodized Bragg grating and the other utilizes two spectrally matched Bragg gratings forming a Fabry-Perot interferometer. Sinusoidal accelerations were applied to both devices and their sensitivities were found to be 0.67 +/- 0.035 mV/g and 14.0 +/- 0.44 mV/g for the single Bragg grating and Fabry-Perot interferometer respectively.