Journal
NANOTECHNOLOGY
Volume 29, Issue 5, Pages -Publisher
IOP PUBLISHING LTD
DOI: 10.1088/1361-6528/aa9aaf
Keywords
micro-supercapacitor; current collector; silver nanowire; one-step patterning; micro-plasma-jet
Funding
- National Natural Science Foundation of China [51402119]
- special foundation for the National Thousands Talent Program in Huazhong University of Science amp
- amp
- amp
- Technology (HUST)
- Fundamental Research Funds for the Central Universities
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The fabrication of a current collector-contained in-plane micro-supercapacitor (MSC) usually requires the patterning of the current collector first and then subsequent patterning of the active material with the assistance of a photoresist and mask. However, this two-step patterning process is too complicated and the photoresist used is harmful to the properties of nanomaterials. Here, we demonstrate a one-step, mask-free strategy to pattern the current collector and the active material at the same time, for the fabrication of an all-solid-state flexible in-plane MSC. Silver nanowires (AgNWs) are used as the current collector. An atmospheric pressure pulsed cold micro-plasma-jet is used to realize the one-step, mask-free production of interdigitated multiwalled carbon nanotube (MWCNT)/AgNW electrodes. Remarkably, the fabricated MWCNT/AgNW-based MSC shows good flexibility and excellent rate capability. Moreover, the performance of properties including cyclic stability, equivalent series resistance, relaxation time and energy/power densities of the MWCNT/AgNW-based MSC are significantly enhanced by the presence of the AgNW current collector.
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