Journal
NANO LETTERS
Volume 18, Issue 3, Pages 1930-1936Publisher
AMER CHEMICAL SOC
DOI: 10.1021/acs.nanolett.7b05295
Keywords
Coaxial aperture; atomic layer lithography; surface-enhanced infrared absorption (SEIRA); silk protein; extraordinary optical transmission; nanogap
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Funding
- U.S. National Science Foundation [ECCS 1610333]
- Seagate Technology
- National Institutes of Health Biotechnology Training Grant [NIH T32 GM008347]
- Spanish MINECO [MAT2014-53432-C5]
- AFOSR [FA9550-11-1-0141, FA9550-12-0357]
- European Research Council Consolidator Grant [ERC-2015-CoG-682167]
- NSF through the National Nanotechnology Coordinated Infrastructure (NNCI)
- Directorate For Engineering [1610333] Funding Source: National Science Foundation
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We present a wafer-scale array of resonant coaxial nanoapertures as a practical platform for surface-enhanced infrared absorption spectroscopy (SEIRA). Coaxial nanoapertures with sub-10 nm gaps are fabricated via photolithography, atomic layer deposition of a sacrificial Al2O3 layer to define the nanogaps, and planarization via glancing-angle ion milling. At the zeroth-order Fabry-Perot resonance condition, our coaxial apertures act as a zero-mode resonator (ZMR), efficiently funneling as much as 34% of incident infrared (IR) light along 10 nm annular gaps. After removing Al2O3 in the gaps and inserting silk protein, we can couple the intense optical fields of the annular nanogap into the vibrational modes of protein molecules. From 7 nm gap ZMR devices coated with a 5 nm thick silk protein film, we observe high contrast IR absorbance signals drastically suppressing 58% of the transmitted light and infer a strong IR absorption enhancement factor of 10(4)similar to 10(5). These single nanometer gap ZMR devices can be mass-produced via batch processing and offer promising routes for broad applications of SEIRA.
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