Journal
MICRON
Volume 113, Issue -, Pages 99-104Publisher
PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.micron.2018.06.016
Keywords
Multiple-ellipse fitting method; HRTEM; STEM; Quantitative analyses; Atomic column position
Categories
Funding
- National Science Foundation of China [61571197, 61172011, 51472215, 51222202]
- National Basic Research Program of China [2014CB932500, 2015CB921004]
- Guangdong Natural Science Foundation [10151064201000006]
- Visiting Scholars Fund of the State Key Laboratory of Silicon Materials [SKL2014-5]
- 111 project [B16042]
- Science and Technology Planning Project of Guangdong [201803020022]
- Water Conservancy Science and Technology Innovation Project of Guangdong [2016-18]
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In this paper, we propose a multiple-ellipse fitting method to accurately determine the atomic column positions in transmission electron microscopy (TEM) images. The column is enclosed by a series of ellipses fitted from contour lines at equidistant intensity levels, and each atomic column is shaped by an averaged elliptical shape to obtain its positions. In particular, the intensity profile of the atomic column can be obtained by an elliptically rotational average based on its shape; therefore, the intensities of the neighbouring atomic column can be subtracted for each atomic column during subsequent position refinement. This method can achieve precision in the picometre range, and we quantitatively measure this precision by analysing an image containing two Gaussian-shaped atoms and some simulated high-resolution transmission electron microscopy (HRTEM) images of SrTiO3.
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