Journal
MICROELECTRONICS JOURNAL
Volume 73, Issue -, Pages 30-36Publisher
ELSEVIER SCI LTD
DOI: 10.1016/j.mejo.2018.01.002
Keywords
Touch mode capacitive pressure sensor; Second notch; Capacitive sensitivity; Capacitance in near linear range; Touch point pressure; Harsh environmental condition; Silicon carbide
Ask authors/readers for more resources
Capacitive Pressure Sensors have consistently been an indispensable application of MEMS (Micro Electro Mechanical Systems) because of their utility and precision. Silicon has proven to be a dominant material in MEMS based sensor design but it is unfit for applications operating in harsh environmental conditions. Silicon Carbide is a justified replacement to Silicon in these conditions due to its solitary attribute of robustness and high temperature tolerance. This work introduces a Silicon Carbide and Aluminum Nitride based DTMCPS (Double Touch Mode Capacitive Pressure Sensor) with a substrate notch. Condensed yet exhaustive step by step mathematics of key performance parameters have been detailed for the sensor under study. This is done to provide a detailed understanding of the underlying physical and mathematical principles. It also aims to provide a fast analysis model for prototyping the sensor to bypass the need for bulky simulation software. A Finite Element Analysis (FEM) analysis for the design was conducted using COMSOL and the results agree with the mathematical model. It is evident from numerical simulation and the FEM analysis that the proposed sensor provides better performance than comparable designs reported in literature.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available