Journal
MEASUREMENT SCIENCE AND TECHNOLOGY
Volume 29, Issue 3, Pages -Publisher
IOP PUBLISHING LTD
DOI: 10.1088/1361-6501/aa9f6d
Keywords
vibration generator; low-frequency calibration system; low cost; high precision; piezoelectric actuator
Funding
- National Natural Science Foundation of China [51705123, 51675157, 51475133]
- Anhui Provincial Natural Science Foundation [1708085QE105]
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Low-frequency vibration is one of the harmful factors that affect the accuracy of micro-/nano-measuring machines because its amplitude is significantly small and it is very difficult to avoid. In this paper, a low-cost and high-precision vibration generator was developed to calibrate an optical accelerometer, which is self-designed to detect low-frequency vibration. A piezoelectric actuator is used as vibration exciter, a leaf spring made of beryllium copper is used as an elastic component, and a high-resolution, low-thermal-drift eddy current sensor is applied to investigate the vibrator's performance. Experimental results demonstrate that the vibration generator can achieve steady output displacement with frequency range from 0.6 Hz to 50 Hz, an analytical displacement resolution of 3.1 nm and an acceleration range from 3.72 mm s(-2) to 1935.41 mm s(-2) with a relative standard deviation less than 1.79%. The effectiveness of the high-precision and low-cost vibration generator was verified by calibrating our optical accelerometer.
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