Sputter-cleaned Epitaxial VxMo(1-x) Ny/MgO(001) Thin Films Analyzed by X-ray Photoelectron Spectroscopy: 3. Polycrystalline V0.49Mo0.51N1.02

VxMo((1-x)) Ny thin films grown by ultrahigh vacuum reactive magnetron sputter deposition on MgO(001) substrates are analyzed by x-ray photoelectron spectroscopy (XPS). This contribution presents analytical results for 300-nm-thick 002-textured polycrystalline V0.49Mo0.51N1.02 films deposited by reactive cosputtering from V (99.95 % purity) and Mo (99.95 % purity) targets. Film growth is carried out at 500 degrees C in mixed Ar/N-2 atmospheres at a total pressure of 5 mTorr, with a N-2 partial pressure of 3.2 mTorr; a bias of -30V is applied to the substrate. Films composition is determined by Rutherford backscattering spectrometry (RBS). XPS measurements employ monochromatic Al K alpha radiation (h(v) = 1486.6 eV) to analyze V0.49Mo0.51N1.02 surface sputter-cleaned in-situ with 4 keV Ar+ ions incident at an angle of 70 degrees with respect to the surface normal. XPS results show that the ion-etched sample surfaces have no measurable oxygen or carbon contamination; film composition, obtained using XPS sensitivity factors, is V0.34Mo0.66N1.00. All core level peaks, including the nearby Mo 3p(3/2) (binding energy of 394.3 eV) and N 1s (at 397.4 eV) peaks, are well-resolved. Comparison to V0.33Mo0.67N0.64 and V0.34Mo0.66N0.81 single-crystal film surfaces, submitted separately to Surface Science Spectra, indicates that with decreasing growth temperature from 900 to 700 and 500 degrees C (and increasing nitrogen concentration in VxMo((1-x)) N-y from y = 0.64 to 0.81 and 1.00) the N 1s core level peak shifts from 397.6 eV to 397.5 eV to 397.4 eV while metal atom peaks move towards higher binding energy by 0.2-0.4 eV. VC 2013 American Vacuum Society.