Journal
ADVANCES IN X-RAY/EUV OPTICS AND COMPONENTS VIII
Volume 8848, Issue -, Pages -Publisher
SPIE-INT SOC OPTICAL ENGINEERING
DOI: 10.1117/12.2022735
Keywords
multilayer; damage characteristics; platinum/carbon; XFEL irradiation
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Funding
- Grants-in-Aid for Scientific Research [13J00129, 23226004] Funding Source: KAKEN
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We evaluated the irradiation damage induced to platinum/carbon multilayers induced by hard X-ray free-electron lasers (XFELs). In this study, in order to test the use of the platinum/carbon multilayers for future XFEL focusing applications, we evaluated the structures in almost exactly the condition in which they would actually be used. The X-ray reflectivity of the multilayers was measured by using XFELs, and a cross-section of the multilayer that was irradiated by an XFEL was observed by transmission electron microscopy. We used a non-monochromatic beam at a photon energy of 10 keV. We confirmed that the intensity of the conditions under which the multilayers are to be used is sufficiently lower than the breakdown threshold of platinum/carbon multilayers.
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