Journal
MATERIALS LETTERS
Volume 221, Issue -, Pages 228-231Publisher
ELSEVIER SCIENCE BV
DOI: 10.1016/j.matlet.2018.03.114
Keywords
PDMS; Thin films; Lift-off; Bio-compatibility; Sensors
Funding
- Fundamental Research for the Central Universities of China [N160302001, N160312001]
- Key Laboratory of Vibration and Control of Aeronautical Equipment, Ministry of Education, Northeastern University [VCAME201604]
- National Natural Science Fundamental of China [51376039]
- National Science and National Science and Technology Major Project of China [2017ZX02201005-001]
- China Scholarship Council [201606350174]
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PDMS (Polydimethylsiloxane) thin films are widely used in stretchable electronics. However, it still remains challenging to fabricate PDMS thin films in an easy and convenient manner. To address this issue, here we novelly present an approach to ease the fabrication of PDMS membranes using lift-off method. For application as substrates in flexible biosensors, a gold thin film has been deposited on the PDMS thin film. The reliability of electric conductivity has been investigated. Moreover, biocompatibility of the PDMS thin film has been tested by culturing HeLa live cells it. The results demonstrate that the PDMS thin films fabricated by lift-off method has a high prospect towards application as substrate in flexible biosensors. (C) 2018 Elsevier B.V. All rights reserved.
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