Journal
INTERNATIONAL CONFERENCE ON FUNCTIONAL MATERIALS AND NANOTECHNOLOGIES 2013 (FM&NT2-13)
Volume 49, Issue -, Pages -Publisher
IOP PUBLISHING LTD
DOI: 10.1088/1757-899X/49/1/012057
Keywords
-
Ask authors/readers for more resources
ZnO:Al (AZO) thin films on glass were deposited by DC reactive magnetron sputtering at approximately 300 degrees C substrate temperature. Structural, electrical and optical properties were investigated as a function of oxygen flow. XRD data shows that AZO thin films are polycrystalline with pronounced c-axis orientation and the grain size increasing with the oxygen flow. The lowest achieved resistivity within the deposited set of samples was 7.6.10(-4) Omega cm. The transmittance of AZO films was above 80 % at 550 nm with the optical band gap between 3.4 and 3.8 eV.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available