Development of large-field high-resolution hard x-ray imaging microscopy and microtomography with Fresnel zone plate objective

A hard x-ray imaging microscope system of high spatial resolution and large field of view (FOV) has been developed at the beamline 37 XU of SPring-8. By utilizing the 30 m-long experimental station, large magnification can be attained with a large diameter Fresnel zone plate (FZP) objective. Some configurations of microscope systems were tested. In a typical condition, a magnification of 133 and a FOV of 123 mu m are attained using a FZP with a diameter of 310 mu m and an outermost zone width of 100 nm, and the spatial resolution evaluated by observing resolution test chart is 160 nm in full pitch of periodic object with an exposure time of 1 s. When a FZP with an outermost zone width of 50 nm is used, a spatial resolution better than 100 nm is achieved. Phase-contrast imaging by Zernike's method was also tested, and three dimensional measurement by computer tomography (CT) method was also carried out.