Fabrication of SERS-active Substrates by Electrochemical and Electroless Deposition of Metals in Macroporous Silicon

SERS-active substrates based on hybrid metallic nanovoids were formed by successive Ni electrodeposition and Ag electroless deposition in macroporous silicon. It was shown that the SERS signal intensity greatly depends on the morphology and elemental composition of hybrid melallization. Optimal regimes of metallization were found which provided fabrication of the most SERS-active substrates demonstrated 10(-11) M detection limit for rhodamine R6G.