Journal
TERRAGREEN 13 INTERNATIONAL CONFERENCE 2013 - ADVANCEMENTS IN RENEWABLE ENERGY AND CLEAN ENVIRONMENT
Volume 36, Issue -, Pages 231-237Publisher
ELSEVIER SCIENCE BV
DOI: 10.1016/j.egypro.2013.07.026
Keywords
MEMS; elastomeric; PDMS; PMMA; deformation
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The list of polymers is long each it presents very interesting mechanical advantages. In this paper we interest more especially to two polymers extensively used in the MEMS and more especially in micro-valve actuators, the PDMS and PMMA. Our goal is to study the mechanical behavior of the two polymeric membrane subjected to equal pressure could drag deformation. We have simulate the mechanical behavior by hyper elastic model of Neo-Hookean and linear elastic in order to compare between the two materials in view of amplitude deformation on one hand, and on the other hand we present the numerical conditions thus (the effect of the step, thickness, number of mesh) in order to optimize the dimensionality of the membrane (C) 2013 The Authors. Published by Elsevier Ltd.
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