Tuning of optical mode magnetic resonance in CoZr/Ru/CoZr synthetic antiferromagnetic trilayers by oblique sputtering

CoZr/Ru/CoZr synthetic antiferromagnetic trilayers with strong antiferromagnetic interlayer coupling were fabricated by an oblique sputtering method that induced in-plane uniaxial magnetic anisotropy. A microstrip method using a vector network analyzer was applied to investigate the magnetic resonance modes of the trilayers, including the acoustic modes (AMs) and the optical modes (OMs). At zero magnetic field, the CoZr/Ru/CoZr trilayers showed OMs with resonance frequencies of up to 7.1 GHz. By increasing the applied external magnetic field, the magnetic resonance mode can be tuned to various OMs, mixed modes, and AMs. Additionally, the magnetic resonance mode showed an angular dependence between the magnetization and the microwave field, which showed similar switching of the magnetic modes with variation of the angle. Our results provide important information that will be helpful in the design of multifunctional microwave devices.