Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 27, Issue 2, Pages 296-304Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JMEMS.2018.2797684
Keywords
Microelectromechanical devices; piezoelectric transducers; ultrasonic; PMUT; PZT; dc bias
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Funding
- Berkeley Sensor and Actuator Center Industrial Members
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In this paper, we report an air-coupled piezoelectric ultrasonic micromachined transducer (PMUT) using a lead-zirconate-titanate (PZT) piezoelectric layer. A dc bias voltage applied to the PZT film controls its polarization and intrinsic stress, tuning the frequencies of two closely-spaced resonance modes of the rectangular shaped PMUT. At an optimal bias voltage of approximately 5 V, the modes nearly overlap at 230 kHz, increasing the bandwidth by a factor of 8 relative to the zero dc biased state. Measurements of the electromechanical coupling coefficient of the PZT film show that it is maximized at 5-6 V, agreeing with device performance experiments. Acoustic transmission and reception were demonstrated using two identical PMUTs by adding the optimum dc bias of 6 V to the 1.4 V peak-to-peak ac voltage which is maximum within the linear displacement regime. The signal detectable range of the transmit and receive measurement with optimum dc bias tuning was 4 cm to 19 cm in air.
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