Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 27, Issue 3, Pages 472-478Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JMEMS.2018.2819994
Keywords
3D printing; miniaturization; micro-bellows membrane; microfabrication; micro device; Parylene C.
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Funding
- King Abdullah University of Science and Technology
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Bellows membranes are essential elements in many actuator devices. Currently, the size, shape, and dimensions of bellows membranes are limited by the fabrication process constraints. Miniaturizing the bellows membranes is a prerequisite for the development of integrated systems with novel capabilities as needed, for example, in advanced biomedical devices. Using a two-photon polymerization, 3-D printing technique, we present a high-resolution, high-yield, and customizable manufacturing process to produce Parylene C micro-bellows. An optimization of the crucial design parameters is performed using finite element modeling from which designs with high deflection and low stress were obtained. Different micro-bellows designs are fabricated and characterized. The total volume of the fabricated models ranges from 3 to 0.3 mm(3) and the minimum feature size is 60 mu m. The achieved cumulative deflection ranges from 300 to 570 mu m.
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