High response solar-blind MgZnO photodetectors grown by molecular beam epitaxy

High quality w-MgxZn1-xO thin films were grown epitaxially on c-plane sapphire substrates by plasma-assisted Molecular Beam Epitaxy. ZnO thin films with high crystalline quality, low defect and dislocation densities, and sub-nanometer surface roughness were achieved by applying a low temperature nucleation layer. By tuning Mg/Zn flux ratio, wurtzite MgxZn1-xO thin films with Mg composition as high as x=0.46 were obtained without phase segregation. Metal-Semiconductor- Metal (MSM) photoconductive and Schottky barrier devices with interdigitated electrode geometry and active surface area of 1 mm(2) were fabricated and characterized. Resultant devices showed similar to 100 A/W peak responsivity at wavelength of similar to 260nm. We also report on cubic rock salt c-MgxZn1-xO thin films, following a non-traditional approach on MgO substrates, to demonstrate solar-blind photoresponse in MSM photodetectors, realizing a peak responsivity of 460 A/W (@ 250 nm) and 12.6 mA/W (@ 240nm) for mixed phase and single crystal films, respectively. A specific focus of the work is on identifying the impact of various growth parameters on the performance of the c-MgZnO detectors.