Journal
JOURNAL OF CRYSTAL GROWTH
Volume 486, Issue -, Pages 104-110Publisher
ELSEVIER SCIENCE BV
DOI: 10.1016/j.jcrysgro.2018.01.024
Keywords
Diamond; Chemical vapor deposition processes; Microwave plasma; Confocal Raman spectroscopy
Funding
- National Science Fund for Distinguished Young Scholars [51625201]
- National Key Research and Development Program of China [2016YFE0201600]
- National Natural Science Foundation of China [51702066]
- International Science & Technology Cooperation Program of China [2015DFR50300]
- Open Fund Key Laboratory of Micro-systems and Micro-structures Manufacturing, Ministry of Education [2016KM001]
- 1000 Talents program
- Major State Basic Search Program [2014CB46505]
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Epitaxial diamond growth by microwave plasma CVD in a CH4/H-2 mixture was performed on vertically standing single crystal diamond substrates with high aspect (height-to-width) ratio. This vertical growth mode allows simultaneous diamond deposition on two large (1 0 0) faces of the substrate, in contrast to only one working face upon conventional horizontal arrangement of the substrate plate. A high plasma density gradient in vertical direction, the characteristic feature of the geometry used (the substrate acts as an antenna), coupled to high substrate temperature gradient (Delta T approximate to 150 degrees C in the particular experiment), are shown to have a strong impact on the epilayer structure, that was characterized with laser scanning microscopy, Raman and photoluminescence confocal spectroscopy mapping across approximate to 3 mm high specimen. The single crystal film transformation to polycrystalline, and further, to nanocrystalline layer, going from top to bottom of the substrate, is described. The vertical distributions of the growth rate, intensity of photoluminescence of NV and SiV color centers imbedded in the diamond film, are measured with high spatial resolution on growth surface and in cross-section, which are also related to the film structure variation. These findings are of importance for search of optimal growth regimes of 3D diamond mosaics and large single crystals by MPCVD. (C) 2018 Elsevier B.V. All rights reserved.
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