Journal
ACS APPLIED MATERIALS & INTERFACES
Volume 7, Issue 4, Pages 2467-2479Publisher
AMER CHEMICAL SOC
DOI: 10.1021/am507327y
Keywords
FEBID; gold nanostructure; nanopillar; nanowire; purity; FEBIC; oxygen plasma cleaning
Funding
- European Community [ENHANCE-238409]
- Austrian Science Fund Project [P24093]
- Center for Micro- and Nanostructures at the Vienna University of Technology
- Austrian Science Fund (FWF) [P24093] Funding Source: Austrian Science Fund (FWF)
- Austrian Science Fund (FWF) [P 24093] Funding Source: researchfish
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Three-dimensional gold (Au) nanostructures offer promise in nanoplasmonics, biomedical applications, electrochemical sensing and as contacts for carbon-based electronics. Direct-write techniques such as focused-electron-beam-induced deposition (FEBID) can provide such precisely patterned nanostructures. Unfortunately, FEBID Au traditionally suffers from a high nonmetallic content and cannot meet the purity requirements for these applications. Here we report exceptionally pure pristine FEBID Au nanostructures comprising submicrometer-large monocrystalline Au sections. On the basis of high-resolution transmission electron microscopy results and Monte Carlo simulations of electron trajectories in the deposited nanostructures, we propose a curing mechanism that elucidates the observed phenomena. The in situ focused-electron-beam-induced curing mechanism was supported by postdeposition ex situ curing and, in combination with oxygen plasma cleaning, is utilized as a straightforward purification method for planar FEBID structures. This work paves the way for the application of FEBID Au nanostructures in a new generation of biosensors and plasmonic nanodevices.
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