Journal
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 57, Issue 8, Pages -Publisher
IOP PUBLISHING LTD
DOI: 10.7567/JJAP.57.08PE03
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Funding
- Matching Planner Program - Japan Science and Technology Agency (JST)
- Ushio Inc.
- Ministry of Education, Culture, Sports, Science and Technology, Japan (MEXT)
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We demonstrated non-destructive and non-contact measurement of semiconductor optical waveguide using optical coherence tomography with a visible broadband light source (vis-OCT). Vis-OCT can provide high axial and lateral resolutions of less than 1 mu m. which were effective for measurement of optical waveguides with several-micrometer structure. We obtained cross-sectional images of ridge-type optical waveguides (RWGs) fabricated as test samples and measured the height and width of the RWGs. The height and width measured by vis-OCT were similar to these values measured by scanning electron microscopy. These results indicated that vis-OCT enables measurement of the height and width of optical waveguides without destruction and contact, which is a useful inspection method for high-quality and high-efficiency integrated optical device fabrications. (C) 2018 The Japan Society of Applied Physics
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