A simple way to higher speed atomic force microscopy by retrofitting with a novel high-speed flexure-guided scanner

A typical line-scan rate for a commercial atomic force microscope (AFM) is about 1 Hz. At such a rate, more than four minutes of scanning time is required to obtain an image of 256 x 256 pixels. Despite control electronics of most commercial AFMs permit faster scan rates, default piezoelectric X-Y scanners limit the overall speed of the system. This is a direct consequence of manufacturers choosing a large scan range over the maximum operating speed for a X-Y scanner. Although some AFM manufacturers offer reduced-scan area scanners as an option, the speed improvement is not significant because such scanners do not have large enough reduction in the scan range and are mainly targeted to reducing the overall cost of the AFM systems. In this article, we present a simple parallel-kinematic substitute scanner for a commercial atomic force microscope to afford a higher scanning speed with no other hardware or software upgrade to the original system. Although the scan area reduction is unavoidable, our modified commercial XE-70 AFM from Park Systems has achieved a line scan rate of over 50 Hz, more than 10 times faster than the original, unmodified system. Our flexure-guided X-Y scanner can be a simple drop-in replacement option for enhancing the speed of various aging atomic force microscopes. (C) 2018 The Japan Society of Applied Physics