Journal
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 57, Issue 4, Pages -Publisher
IOP PUBLISHING LTD
DOI: 10.7567/JJAP.57.04FP02
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Funding
- Basic Research Program through the National Research Foundation of Korea (NRF) - Ministry of Education, Science and Technology [2016R1A2B4008754]
- Business Start-up Technology Development Project - Small and Medium Business Administration (SMBA, Korea) [S2409184]
- Korea Technology & Information Promotion Agency for SMEs (TIPA) [S2409184] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
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We fabricate high-sensitivity pH sensors using single-walled carbon-nanotube (SWCNT) network thin-film transistors (TFTs). The sensing and transducer parts of the pH sensor are composed of separative extended-sensing gates (ESGs) with SnO2 ion-sensitive membranes and doublegate structure TFTs with thin SWCNT network channels of similar to 1 nm and AlOx top-gate insulators formed by the solution-deposition method. To prevent thermal process-induced damages on the SWCNT channel layer due to the post-deposition annealing process and improve the electrical characteristics of the SWCNT-TFTs, microwave irradiation is applied at low temperatures. As a result, a pH sensitivity of 7.6 V/pH, far beyond the Nernst limit, is obtained owing to the capacitive coupling effect between the top-and bottom-gate insulators of the SWCNT-TFTs. Therefore, double-gate structure SWCNT-TFTs with separated ESGs are expected to be highly beneficial for high-sensitivity disposable biosensor applications. (C) 2018 The Japan Society of Applied Physics.
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