Journal
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 57, Issue 7, Pages -Publisher
IOP Publishing Ltd
DOI: 10.7567/JJAP.57.07MG02
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Funding
- JSPS KAKENHI [JP 17H06293, JP 15H01786]
- JST CREST, Japan [JPMJCR1532]
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A concept of a multilink test scheme with a two-step probability plot and its statistical accuracy of estimation are investigated for the time-dependent dielectric breakdown under defect clustering condition in the back end of line and middle of line. It is useful for obtaining an accurate estimation of lifetime that explains a complicated distribution shape due to impacts of clustered defects. Furthermore, applying a regression of the electric field dependence of breakdown to the lifetime distribution analysis will provide a more accurate estimation. (C) 2018 The Japan Society of Applied Physics
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