Diffractive 3D XUV optics at Helmholtz-Zentrum Berlin, recent developments

The 2-Dimensional and 3-Dimensional variable line spacing (VLS) gratings based on total external reflection give the unique possibility for spectroscopy and focusing in application to 4th and 5th generation synchrotron sources. We focus on the elaboration of novel approaches for design and fabrication of 3D VLS working in the entire energy range, from THz to hard X-rays. These optical elements have unique combination of properties and can operate at all XUV sources including Free Electron Lasers (FELs), Energy Recovery Linacs (ERLs) and High Harmonic Generators (HHGs). Such 3D DOEs are able to cover the energy range of up to 20 keV with energy resolution lambda/Delta lambda >= 1000 for soft x-ray and lambda/Delta lambda >= 10000 for hard x-ray. We fabricate 3D VLS for time-resolved spectroscopy (energy range 100 - 2000 eV, 7500-9500 eV), FELs and ERLs (energy range up to 3 keV), and HHGs (energy range 10 - 200 eV).