Journal
THIN FILM TRANSISTORS 12 (TFT 12)
Volume 64, Issue 10, Pages 155-164Publisher
ELECTROCHEMICAL SOC INC
DOI: 10.1149/06410.0155ecst
Keywords
-
Ask authors/readers for more resources
It is revealed that c-axis aligned crystal In-Ga-Zn oxide(CAAC-IGZO) and nanocrystalline IGZO films are suitable for practical use due to their high-density crystalline morphologies and stability under electron beam irradiation in transmission electron microscope observation. We attempted to reproduce an amorphous IGZO film with no ordering. However, we found nanocrystals in the film and this film has low density and is soft, so that it is an unstable material in which crystals grow when subjected to electron beam irradiation in TEM observation. We fabricated field-effect transistors using CAAC-IGZO and examined their switching characteristics. As a result of microfabrication scaling, cutoff frequencies of 2 GHz and 1.5 GHz were obtained when the channel lengths were 60 nm and 100 nm, respectively. This opens new possibilities for oxide semiconductor large-scale integration.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available