Journal
IET CIRCUITS DEVICES & SYSTEMS
Volume 12, Issue 1, Pages 88-93Publisher
WILEY
DOI: 10.1049/iet-cds.2017.0250
Keywords
micromechanical resonators; band-stop filters; band-pass filters; radio transceivers; frequency response; dual frequency MEMS resonator filter; mixed electrical-mechanical coupling scheme; miniaturised transceivers; multiband wireless communication systems; low power consumption; data rates; microelectromechanical system; transceivers; intermediate frequency signal filter; IF signal filter; radio frequency signal filter; dual frequency capacitive transduced MEMS resonator; two-port electrical configuration; clamped-clamped beam resonator; resonant tank; filter concept validation; design strategies; transduction area; low loss structural material; array design; sub-micrometer transduction gap; narrow passband filter; dual frequency response; stop band rejection; dual bandpass filter; dual frequency oscillator applications; frequency 400 kHz; frequency 2; 57 MHz; frequency 3 kHz; frequency 20 kHz; loss 19; 8 dB; loss 25; 6 dB
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Funding
- DeitY, MCIT, Government of India
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Miniaturised transceivers are essential in multiband wireless communication systems for higher data rates and low power consumption. Microelectromechanical system (MEMS) resonator filters are actively considered for deployment in transceivers for radio frequency and intermediate frequency (IF) signal filter and oscillator applications. In this study, the authors propose dual frequency capacitive transduced MEMS resonator with two-port electrical configuration. Clamped-clamped beam resonator was selected to serve as a basic resonant tank for the filter concept validation. Five design strategies low loss structural material, array design, mixed electrical and mechanical coupling scheme, sub-micro meter transduction gap and large transduction area were explored. With these strategies, the device achieves dual band filter characteristics, narrow pass band, desired bandwidth, low insertion loss and better stop band rejection. Dual frequency response of the proposed resonator is demonstrated at centre frequencies 400 kHz and 2.57 MHz with a narrow pass band of 3 and 20 kHz, respectively. Low insertion loss of 19.8 and 25.6 dB for frequencies centred at 400 kHz and 2.57 MHz, respectively and stop band rejection > 35 dB was achieved. The proposed MEMS resonator may be incorporated in the implementation of dual band pass filter for IF signal filter and dual frequency oscillator applications.
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