Journal
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL
Volume 65, Issue 4, Pages 617-629Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TUFFC.2018.2796303
Keywords
Acoustic transformer; capacitive micromachined ultrasonic transducer (CMUT); finite-element method (FEM) modeling; galvanic isolation; power switch control
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Funding
- Programme de l'economie numerique des Investissements d'Avenir
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This paper presents the development of a novel acoustic transformer with high galvanic isolation dedicated to power switch triggering. The transformer is based on two capacitive micromachined ultrasonic transducers layered on each side of a silicon substrate; one is the primary circuit, and the other is the secondary circuit. The thickness mode resonance of the substrate is leveraged to transmit the triggering signal. The fabrication and characterization of an initial prototype is presented in this paper. All experimental results are discussed, from the electrical impedance measurements to the power efficiency measurements, for different electrical load conditions. A comparison with a specifically developed finite-element method model is done. Simulations are finally used to identify the optimization rules of this initial prototype. It is shown that the power efficiency can be increased from 35% to 60%, and the transmitted power can be increased from 1.6 to 45 mW/Volt.
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