Journal
IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT
Volume 67, Issue 8, Pages 1994-2000Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TIM.2018.2809840
Keywords
Terms-Corrugated diaphragm (CD); Fabry-Perot; fiber; microphone; silver
Funding
- National Natural Science Foundation of China [61377009]
- Major National Scientific Instrument and Equipment Development Project of China [2013YQ290489]
- Fundamental Research Funds for the Central Universities
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A corrugated silver diaphragm-based optical fiber microphone (OFM), formed by extrinsic Fabry-Perot interferometric structure, was proposed. The sensor's sensitivity was improved by releasing diaphragm's initial stress with the help of corrugations. A simple gray-scale exposure method was proposed to fabricate the corrugation. Experimental results indicated that the mechanical sensitivity of the fabricated corrugated diaphragm (CD) was 52 nm/Pa, which was twice that of the planar diaphragm under the same parameters. Other characteristics of the fabricated microphone were also tested in detail. The proposed CD-based OFM showed the advantages of high sensitivity, simplicity and low cost, which was expected to be applied in the field of weak acoustic sensing.
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