Development of a Two-Dimensional Linear Piezoelectric Stepping Platform Using Longitudinal-Bending Hybrid Actuators

A novel two-dimensional (2-D) linear piezoelectric stepping platform using two parallel longitudinal-bending hybrid piezoelectric actuators is proposed in this paper. The proposed platform is moved in the X-direction by combing the vertical and horizontal bending motions of the parallel actuators, whereas the movement in the Y-direction is realized by the vertical bending and longitudinal hybrid motions. The platform is designed and its operating principles in two orthogonal directions are described. The finite-element method simulations are performed to verify the operating principles of the 2-D platform. Two piezoelectric actuators are fabricated and a prototype of the platform is assembled. The measured results of mechanical output performance indicate that the velocities of the platform are 101.7 and 124.2 mu m/s in X-and Y-directions when the voltage and frequency are 400 Vp-p and 5 Hz, respectively, which verifies the feasibility of the proposed mechanism for the 2-D stepping platform.