A Piezoelectric-Driven Linear Actuator by Means of Coupling Motion

A piezoelectric-driven actuator based on coupling motion has been proposed and tested to achieve a large linear working stroke with high resolution. Z-shaped flexure hinges are exploited for the symmetric flexure hinge mechanism to reduce the structural stress. Couplingmotion is obtained by placing this symmetric flexure hinge mechanism with an angle of theta = 20 degrees to the slider. Experimental results indicate that linear motion with a large working stroke is effectively obtained by this coupling motion; the maximum motion speed is V-s = 6057 mu m/s and the maximumoutput force is F-g = 350 g. Additionally, the influences of input frequency f and input voltage U-e are investigated, and the system kinetic model is established to better analyze the performance of this designed piezoelectric-driven linear actuator.