Gas Detection Microsystem With MEMS Gas Sensor and Integrated Circuit

In this paper, a gas detection microsystem which consists of a highly sensitive micro-electro mechanical systems (MEMS) gas sensor and a CMOS integrated circuit, including a read-out circuit, data processing circuit, and an interface circuit is presented. The integrated microsystem whose area is less than 3 mm(2) can work with only power supply due to the integration and flexibility. By packing the MEMS gas sensor with the integrated circuit using a customized package, the system can detect a variety of gases, including ethylene glycol, ammonia, and alcohol accurately at low concentrations (<1 ppm). The maximum response toward the gas in the concentration of 100 ppm can reach about 8.