Journal
PHYSICS OF PLASMAS
Volume 22, Issue 1, Pages -Publisher
AIP Publishing
DOI: 10.1063/1.4905515
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Funding
- Converging Research Center Program [NRF-2014M3C1A8053701]
- National RD Program [NRF-2014M1A7A1A03045185]
- National Research Foundation of Korea - Ministry of Education, Science, and Technology [NRF-2012R1A1B3001557]
- Industrial Strategic Technology Development Program [10041681, 10049164]
- MOTIE/KEIT - Ministry of Knowledge Economy [10045232]
- Korea Evaluation Institute of Industrial Technology (KEIT) [10049164] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
- National Research Foundation of Korea [2011M3C1A8003877, 2012R1A1B3001557, 22A20130012084] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
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The total energy lost per electron-ion pair lost epsilon(T) is investigated with the electron energy distribution function (EEDF). The EEDFs are measured at various argon powers in RF inductively coupled plasma, and the EEDFs show a depleted distribution (a discontinuity occurring at the minimum argon excitation threshold energy level) with the bulk temperature and the tail temperature. The total energy loss per electron-ion pair lost epsilon(T) is calculated from a power balance model with the Maxwellian EEDFs and the depleted EEDFs and then compared with the measured epsilon(T) from the floating probe. It is concluded that the small population of the depleted high energy electrons dramatically increases the collisional energy loss, and the calculated epsilon(T) from the depleted EEDFs has a value that is similar to the measured epsilon(T). (C) 2015 AIP Publishing LLC.
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