Journal
JOURNAL OF APPLIED PHYSICS
Volume 117, Issue 16, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/1.4919007
Keywords
-
Categories
Funding
- Belgian Government through the Pole d'Attraction Interuniversitaire (PAI) [P7/34]
- Walloon Region (DGO6) through the Opti2mat program
Ask authors/readers for more resources
Time-resolved characterization of an Ar-Ti high-power impulse magnetron sputtering discharge has been performed. The present, second, paper of the study is related to the discharge characterization in terms of the absolute density of species using resonant absorption spectroscopy. The results on the time-resolved density evolution of the neutral and singly-ionized Ti ground state atoms as well as the metastable Ti and Ar atoms during the discharge on-and off-time are presented. Among the others, the questions related to the inversion of population of the Ti energy sublevels, as well as to re-normalization of the two-dimensional density maps in terms of the absolute density of species, are stressed. (C) 2015 AIP Publishing LLC.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available