Journal
EUROPEAN PHYSICAL JOURNAL D
Volume 72, Issue 5, Pages -Publisher
SPRINGER
DOI: 10.1140/epjd/e2017-80565-y
Keywords
-
Categories
Funding
- Deutsche Forschungsgemeinschaft of the Transregional Collaborative Research Center [SFB/TRR 24]
Ask authors/readers for more resources
Capacitively coupled discharges with a radio-frequency operated voltage (ccrf) are important for plasma assisted material processing. Experiments with electronegative oxygen ccrf discharges show a highenergy peak in the energy distribution of negative ions arriving at the anode, depending on the cathode material used. One possible explanation is ionization at or close to the surface of the cathode for the production of negative ions. By introducing an additional surface ionization model into a Particle-In-Cell (PIC) simulation with Monte Carlo Collisions (MCC) the experimental result is reproduced qualitatively. Comparison of one dimensional and two dimensional simulation results allows an improved understanding of the microscopic processes determining the dynamics of negative ions.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available