Journal
INTERNATIONAL JOURNAL ON SMART SENSING AND INTELLIGENT SYSTEMS
Volume 8, Issue 3, Pages 1601-1623Publisher
INT JOURNAL SMART SENSING & INTELLIGENT SYSTEMS
DOI: 10.21307/ijssis-2017-821
Keywords
SAW device; Optical lithography; RF characterization; Mass Loading; Chemical sensor
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In this paper, a low cost fabrication of sub micron features size SAW device with conventional lithography and their application for toxic chemical vapor detection has been presented. The SAW devices with different interdigital transducer (IDT) electrodes line widths were designed and fabricated. The fabricated SAW devices features had an accuracy of +/- 0.1 mu m. Frequency response of the SAW devices was measured with vector network analyzer for design parameter confirmation. The fabricated devices have been configured in multisensory oscillator configuration and tested with chemical ware fare agents simulants at very low concentration (ppb).
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