Journal
2015 28TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2015)
Volume -, Issue -, Pages 1012-1015Publisher
IEEE
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We demonstrate a radio frequency (RF) probe based on microelectromechanical systems (MEMS) design and processing technologies. The probe responds to the current needs of microelectronics requiring microwave characterization of nanoscale devices and systems having micrometer pad sizes. The use of MEMS technologies enables the probe contact pad area dimensions to be reduced by a three orders of magnitude compared to existing commercial RF probes. On-wafer RF measurements prove the feasibility of the approach to 30 GHz at very low contact resistance << 1 Omega. A contact aging study demonstrates that the probes are capable of forming this contact for 6000 contact cycles.
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